Development of the micro pixel chamber based on MEMS technology oleh Takemura T., Takada A., Kishimoto T., Komura S., Kubo H., Matsuoka Y., Miuchi K., Miyamoto S., Mizumoto T., Mizumura Y., Motomura T., Nakamasu Y., Nakamura K., Oda M., Ohta K., Parker J. D., Sawano T., Sonoda S., Tanimori T., Tomono D., Yoshikawa K.