Wafer-scale nanofabrication of telecom single-photon emitters in silicon oleh Michael Hollenbach, Nico Klingner, Nagesh S. Jagtap, Lothar Bischoff, Ciarán Fowley, Ulrich Kentsch, Gregor Hlawacek, Artur Erbe, Nikolay V. Abrosimov, Manfred Helm, Yonder Berencén, Georgy V. Astakhov