Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon oleh Camilo Florian, Daniel Fischer, Katharina Freiberg, Matthias Duwe, Mario Sahre, Stefan Schneider, Andreas Hertwig, Jörg Krüger, Markus Rettenmayr, Uwe Beck, Andreas Undisz, Jörn Bonse