Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging oleh Lert Chayanun, Janka Biznárová, Lunjie Zeng, Per Malmberg, Andreas Nylander, Amr Osman, Marcus Rommel, Pui Lam Tam, Eva Olsson, Per Delsing, August Yurgens, Jonas Bylander, Anita Fadavi Roudsari