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    Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

    Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure oleh Chyuan-Haur Kao, Kuan-Lin Chen, Yi-Shiang Chiu, Lin Sang Hao, Shih-Ming Chen, Ming-Hsien Li, Ming-Ling Lee, Hsiang Chen

    Diterbitkan 2022-02-01
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