Hasil Pencarian - Liang-Cheng Tu

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  1. 1
    A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

    A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process oleh Kang Rao, Xiaoli Wei, Shaolin Zhang, Mengqi Zhang, Chenyuan Hu, Huafeng Liu, Liang-Cheng Tu

    Diterbitkan 2019-06-01
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  2. 2
    An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

    An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer oleh Xiaoxiao Song, Huafeng Liu, Yanyan Fang, Chun Zhao, Ziqiang Qu, Qiu Wang, Liang-Cheng Tu

    Diterbitkan 2020-06-01
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  3. 3
    Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications

    Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement Applications oleh Zhu Li, Wen Jie Wu, Pan Pan Zheng, Jin Quan Liu, Ji Fan, Liang Cheng Tu

    Diterbitkan 2016-09-01
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