EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning oleh Procopios Constantinou, Taylor J. Z. Stock, Li-Ting Tseng, Dimitrios Kazazis, Matthias Muntwiler, Carlos A. F. Vaz, Yasin Ekinci, Gabriel Aeppli, Neil J. Curson, Steven R. Schofield