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    Research on the influence of stamping materials on resist flow and the residual layer in thermal nanoimprint lithography

    Research on the influence of stamping materials on resist flow and the residual layer in thermal nanoimprint lithography oleh Hong‐Wen Sun, Tian‐Hua Tang, Jing‐Sheng Wang, Li‐Jun Gu, Yan‐Chun Huang, Ya‐Ru Li

    Diterbitkan 2023-09-01
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