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    Surface Morphology of Single and Multi-Layer Silicon Nitride Dielectric Nano-Coatings on Silicon Dioxide and Polycrystalline Silicon

    Surface Morphology of Single and Multi-Layer Silicon Nitride Dielectric Nano-Coatings on Silicon Dioxide and Polycrystalline Silicon oleh Liga AVOTINA, Elina PAJUSTE, Marina ROMANOVA, Gennady ENICHEK, Aleksandrs ZASLAVSKIS, Valentina KINERTE, Juris AVOTINS, Yuri DEHTJARS, Gunta KIZANE

    Diterbitkan 2019-11-01
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