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    Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers

    Fabrication Process for Deep Submicron SQUID Circuits with Three Independent Niobium Layers oleh Silke Wolter, Julian Linek, Josepha Altmann, Thomas Weimann, Sylke Bechstein, Reinhold Kleiner, Jörn Beyer, Dieter Koelle, Oliver Kieler

    Diterbitkan 2021-03-01
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