Modeling the mechanical response of microelectromechanical system (MEMS)-based sensors to volatile alcohol vapors: A finite element analysis oleh Haya Alrashed, Abdulfattah Obeid, Hamad Albrithen, Muthumareeswaran Muthuramamoorthy, Shofiur Rahman, Mahmoud A. Al-Gawati, Abdullah N. Alodhayb