Silicon single-photon avalanche diodes with nano-structured light trapping oleh Kai Zang, Xiao Jiang, Yijie Huo, Xun Ding, Matthew Morea, Xiaochi Chen, Ching-Ying Lu, Jian Ma, Ming Zhou, Zhenyang Xia, Zongfu Yu, Theodore I. Kamins, Qiang Zhang, James S. Harris