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    Investigation of Polishing Pads Impregnated with Fe and Al2O3 Particles for Single-Crystal Silicon Carbide Wafers

    Investigation of Polishing Pads Impregnated with Fe and Al2O3 Particles for Single-Crystal Silicon Carbide Wafers oleh Jihng-Kuo Ho, Chih-Yung Huang, Ming-Yi Tsai, Che-Cheng Tsai

    Diterbitkan 2016-03-01
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