Hasil Pencarian - Chaowei Si

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  1. 1
    Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope

    Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope oleh Fuhua Yang, Guowei Han, Chaowei Si, Jin Ning

    Diterbitkan 2013-08-01
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  2. 2
    Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications

    Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications oleh Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning

    Diterbitkan 2015-09-01
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  3. 3
    The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes

    The Characteristics and Locking Process of Nonlinear MEMS Gyroscopes oleh Yan Su, Pengfei Xu, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang

    Diterbitkan 2020-02-01
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  4. 4
    A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

    A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers oleh Yurong He, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning, Fuhua Yang

    Diterbitkan 2021-01-01
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  5. 5
    A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope

    A Novel Packaged Ultra-High Q Silicon MEMS Butterfly Vibratory Gyroscope oleh Lu Jia, Guowei Han, Zhenyu Wei, Chaowei Si, Jin Ning, Fuhua Yang, Weihua Han

    Diterbitkan 2022-11-01
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  6. 6
    A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology

    A Novel Piezoresistive MEMS Pressure Sensors Based on Temporary Bonding Technology oleh Peishuai Song, Chaowei Si, Mingliang Zhang, Yongmei Zhao, Yurong He, Wen Liu, Xiaodong Wang

    Diterbitkan 2020-01-01
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  7. 7
    Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

    Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators oleh Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Liuhong Ma, Yongmei Zhao, Jin Ning

    Diterbitkan 2015-02-01
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  8. 8
    Research on Wafer-Level MEMS Packaging with Through-Glass Vias

    Research on Wafer-Level MEMS Packaging with Through-Glass Vias oleh Fan Yang, Guowei Han, Jian Yang, Meng Zhang, Jin Ning, Fuhua Yang, Chaowei Si

    Diterbitkan 2018-12-01
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  9. 9
    Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

    Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope oleh Jian Yang, Chaowei Si, Fan Yang, Guowei Han, Jin Ning, Fuhua Yang, Xiaodong Wang

    Diterbitkan 2018-02-01
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  10. 10
    PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

    PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes oleh Yan Su, Xin Tong, Nan Liu, Guowei Han, Chaowei Si, Jin Ning, Zhaofeng Li, Fuhua Yang

    Diterbitkan 2018-03-01
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  11. 11
    A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging

    A Novel High-Q Dual-Mass MEMS Tuning Fork Gyroscope Based on 3D Wafer-Level Packaging oleh Pengfei Xu, Chaowei Si, Yurong He, Zhenyu Wei, Lu Jia, Guowei Han, Jin Ning, Fuhua Yang

    Diterbitkan 2021-09-01
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  12. 12
    A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

    A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost oleh Yingchun Fu, Guowei Han, Jiebin Gu, Yongmei Zhao, Jin Ning, Zhenyu Wei, Fuhua Yang, Chaowei Si

    Diterbitkan 2022-07-01
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  13. 13
    A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

    A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes oleh Pengfei Xu, Zhenyu Wei, Zhiyu Guo, Lu Jia, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang

    Diterbitkan 2021-04-01
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  14. 14
    ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

    ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release oleh Pengfei Xu, Zhenyu Wei, Lu Jia, Yongmei Zhao, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang

    Diterbitkan 2021-10-01
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  15. 15
    A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

    A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope oleh Jian Yang, Chaowei Si, Guowei Han, Meng Zhang, Jin Ning, Yongmei Zhao, Fuhua Yang, Xiaodong Wang

    Diterbitkan 2019-04-01
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  16. 16
    Effects of Mask Material on Lateral Undercut of Silicon Dry Etching

    Effects of Mask Material on Lateral Undercut of Silicon Dry Etching oleh Yongkang Zhang, Zhongxuan Hou, Chaowei Si, Guowei Han, Yongmei Zhao, Xiaorui Lu, Jiahui Liu, Jin Ning, Fuhua Yang

    Diterbitkan 2023-01-01
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  17. 17
    Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication

    Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication oleh Meng Zhang, Jian Yang, Yurong He, Fan Yang, Yongmei Zhao, Fen Xue, Guowei Han, Chaowei Si, Jin Ning

    Diterbitkan 2019-06-01
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  18. 18
    Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure

    Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure oleh Xiaorui Lu, Jiahui Liu, Guowei Han, Chaowei Si, Yongmei Zhao, Zhongxuan Hou, Yongkang Zhang, Jin Ning, Fuhua Yang

    Diterbitkan 2022-11-01
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  19. 19
    A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer

    A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer oleh Jian Yang, Meng Zhang, Yurong He, Yan Su, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang, Xiaodong Wang

    Diterbitkan 2019-09-01
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  20. 20
    A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy

    A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy oleh Zhongxuan Hou, Yongkang Zhang, Chaowei Si, Guowei Han, Yongmei Zhao, Xiaorui Lu, Jiahui Liu, Jin Ning, Tongbo Wei

    Diterbitkan 2023-05-01
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