Hasil Pencarian - Chao-Chang A. Chen

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  1. 1
    Contamination reduction for 150 mm SiC substrates by integrating CMP and Post-CMP cleaning

    Contamination reduction for 150 mm SiC substrates by integrating CMP and Post-CMP cleaning oleh Chi-Hsiang Hsieh, Ming-Hsun Lee, Chao-Chang A Chen, Chang-Ching Tu, Hao-Chung Kuo

    Diterbitkan 2023-01-01
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  2. 2
    Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System

    Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System oleh Chao-Chang A. Chen, Jen-Chieh Li, Wei-Cheng Liao, Yong-Jie Ciou, Chun-Chen Chen

    Diterbitkan 2020-12-01
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  3. 3
    Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies

    Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies oleh Chi-Hsiang Hsieh, Che-Yuan Chang, Yi-Kai Hsiao, Chao-Chang A. Chen, Chang-Ching Tu, Hao-Chung Kuo

    Diterbitkan 2022-10-01
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