Hasil Pencarian - Chao-Chang A. Chen
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Contamination reduction for 150 mm SiC substrates by integrating CMP and Post-CMP cleaning oleh Chi-Hsiang Hsieh, Ming-Hsun Lee, Chao-Chang A Chen, Chang-Ching Tu, Hao-Chung Kuo
Diterbitkan 2023-01-01
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2
Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System oleh Chao-Chang A. Chen, Jen-Chieh Li, Wei-Cheng Liao, Yong-Jie Ciou, Chun-Chen Chen
Diterbitkan 2020-12-01
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3
Recent Advances In Silicon Carbide Chemical Mechanical Polishing Technologies oleh Chi-Hsiang Hsieh, Che-Yuan Chang, Yi-Kai Hsiao, Chao-Chang A. Chen, Chang-Ching Tu, Hao-Chung Kuo
Diterbitkan 2022-10-01
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