Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles oleh Avik Ghosh Dastidar, Reshmi Maity, Ramesh Chandra Tiwari, Dejan Vidojevic, Tijana S. Kevkic, Vojkan Nikolic, Subhajit Das, Niladri Pratap Maity