Entanglement across separate silicon dies in a modular superconducting qubit device oleh Alysson Gold, J. P. Paquette, Anna Stockklauser, Matthew J. Reagor, M. Sohaib Alam, Andrew Bestwick, Nicolas Didier, Ani Nersisyan, Feyza Oruc, Armin Razavi, Ben Scharmann, Eyob A. Sete, Biswajit Sur, Davide Venturelli, Cody James Winkleblack, Filip Wudarski, Mike Harburn, Chad Rigetti