Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride oleh Adam Raptakis, Lefteris Gounaridis, Jörn P. Epping, Thi Lan Anh Tran, Thomas Aukes, Moritz Kleinert, Madeleine Weigel, Marco Wolfer, Alexander Draebenstedt, Christos Tsokos, Panos Groumas, Efstathios Andrianopoulos, Nikos Lyras, Dimitrios Nikolaidis, Elias Mylonas, Nikolaos Baxevanakis, Roberto Pessina, Erik Schreuder, Matthijn Dekkers, Volker Seyfried, Norbert Keil, René G. Heideman, Hercules Avramopoulos, Christos Kouloumentas