Silicon photonic beam steering module with backside coupling elements toward dense heterogeneous integration with drive electronics oleh X. Chen, F. Meng, S. A. Fortune, A. J. Compston, M. Ebert, X. Yan, H. Du, M. Banakar, D. T. Tran, C. G. Littlejohns, D. J. Thomson, R. Nicolaescu, G. T. Reed